CHEMICAL NONUNIFORMITY OF THIN DIELECTRIC FILMS PRODUCED BY AMMONOLYSIS OF MONOSILANE

被引：15

作者：

BELYI, VI ^{[1
]}

KUZNETSOV, FA ^{[1
]}

SMIRNOVA, TP ^{[1
]}

CHRAMOVA, LV ^{[1
]}

KRAVCHENKO, LK ^{[1
]}

机构：

[1] ACAD SCI USSR,INORG CHEM INST,NOVOSIBIRSK 630090,USSR

来源：

关键词：

D O I：

10.1016/0040-6090(76)90169-3

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：L39 / L42

页数：4

共 12 条

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[J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1973, 120 (03) : 446 - 453
[10] SMIRNOVA TP, 1975, MIKROELEKTRONIKA, V3, P263