FORMATION OF POLYHEDRAL N2 BUBBLES DURING REACTIVE SPUTTER DEPOSITION OF EPITAXIAL TIN(100) FILMS

被引：111

作者：

HULTMAN, L

SUNDGREN, JE

GREENE, JE

机构：

[1] UNIV ILLINOIS,COORDINATED SCI LAB,DEPT MAT SCI,URBANA,IL 61801

[2] UNIV ILLINOIS,MAT RES LAB,URBANA,IL 61801

来源：

JOURNAL OF APPLIED PHYSICS | 1989年 / 66卷 / 02期

关键词：

D O I：

10.1063/1.343570

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：536 / 544

页数：9

共 58 条

[1] PARAMETERS IN SIMON EQUATION RELATING PRESSURE AND MELTING TEMPERATURE [J].

BABB, SE .

REVIEWS OF MODERN PHYSICS, 1963, 35 (02) :400-&

[2] THEORY OF SWELLING AND GAS RELEASE FOR REACTOR MATERIALS [J].

BARNES, RS .

JOURNAL OF NUCLEAR MATERIALS, 1964, 11 (02) :135-148

[3] COALESCENCE OF HELIUM BUBBLES IN ALUMINUM [J].

CHEN, KY ;

COST, JR .

JOURNAL OF NUCLEAR MATERIALS, 1974, 52 (01) :59-74

[4] TEM IMAGES OF FACETED BUBBLES AND VOIDS [J].

COCHRANE, B ;

GOODHEW, PJ .

PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1983, 77 (01) :269-282

[5] NUMBER OF GAS ATOMS PER BUBBLE OF INERT-GAS IN A SOLID [J].

COST, JR ;

CHEN, KY .

JOURNAL OF NUCLEAR MATERIALS, 1977, 67 (03) :265-272

[6] ION ENERGIES AT CATHODE OF A GLOW DISCHARGE [J].

DAVIS, WD ;

VANDERSLICE, TA .

PHYSICAL REVIEW, 1963, 131 (01) :219-&

[7] LATTICE IMAGES OF SOLID XENON PRECIPITATES IN ALUMINUM AT ROOM-TEMPERATURE [J].

DONNELLY, SE ;

ROSSOUW, CJ .

SCIENCE, 1985, 230 (4731) :1272-1273

[8] SOLID BUBBLE FORMATION IN TITANIUM INJECTED WITH KRYPTON IONS [J].

EVANS, JH ;

MAZEY, DJ .

JOURNAL OF NUCLEAR MATERIALS, 1986, 138 (2-3) :176-184

[9] EVIDENCE FOR SOLID KRYPTON BUBBLES IN COPPER, NICKEL AND GOLD AT 293-K [J].

EVANS, JH ;

MAZEY, DJ .

JOURNAL OF PHYSICS F-METAL PHYSICS, 1985, 15 (01) :L1-L6

[10] THE ROLE OF THE INTERFACE IN DETERMINING THE ORIENTATION OF SOLID RARE-GAS BUBBLES IN METALS [J].

FINNIS, MW .

ACTA METALLURGICA, 1987, 35 (10) :2543-2547

← 1 2 3 4 5 6 →