FORMATION OF POLYHEDRAL N2 BUBBLES DURING REACTIVE SPUTTER DEPOSITION OF EPITAXIAL TIN(100) FILMS

被引：111

作者：

HULTMAN, L

SUNDGREN, JE

GREENE, JE

机构：

[1] UNIV ILLINOIS,COORDINATED SCI LAB,DEPT MAT SCI,URBANA,IL 61801

[2] UNIV ILLINOIS,MAT RES LAB,URBANA,IL 61801

来源：

JOURNAL OF APPLIED PHYSICS | 1989年 / 66卷 / 02期

关键词：

D O I：

10.1063/1.343570

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：536 / 544

页数：9

共 58 条

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