STRUCTURE AND PROPERTIES OF TIN COATINGS

被引:844
作者
SUNDGREN, JE
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D O I
10.1016/0040-6090(85)90333-5
中图分类号
T [工业技术];
学科分类号
08 ;
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页码:21 / 44
页数:24
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共 72 条
[1]   INVESTIGATION OF TIN FILMS REACTIVELY SPUTTERED USING A SPUTTER GUN [J].
AHN, KY ;
WITTMER, M ;
TING, CY .
THIN SOLID FILMS, 1983, 107 (01) :45-54
[2]   EFFECT OF IMPURITIES ON INTRINSIC STRESS IN THIN NI FILMS [J].
ALEXANDER, PM ;
HOFFMAN, RW .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1976, 13 (01) :96-98
[3]   CHARACTERIZATION OF TITANIUM NITRIDE FILMS DEPOSITED ONTO SILICON [J].
ARMIGLIATO, A ;
CELOTTI, G ;
GARULLI, A ;
GUERRI, S ;
OSTOJA, P ;
ROSA, R ;
MARTINELLI, G .
THIN SOLID FILMS, 1982, 92 (04) :341-346
[4]  
BLACHMAN AG, 1973, J VAC SCI TECHNOL, V10, P355
[5]   ARRANGEMENT OF OPTICAL MEASUREMENT VALUES FOR ELECTRONIC BAND-STRUCTURE IN MIXED-CRYSTAL SERIES TI(C,N) [J].
BOHM, G ;
GORETZKI, H .
JOURNAL OF THE LESS-COMMON METALS, 1972, 27 (03) :311-&
[6]   TIN COATINGS ON STEEL [J].
BUHL, R ;
PULKER, HK ;
MOLL, E .
THIN SOLID FILMS, 1981, 80 (1-3) :265-270
[7]  
CHASSAING G, 1980, VIDE COUCHE MINCES S, V201, P389
[8]   MICROHARDNESS OF TINX COATINGS OBTAINED BY REACTIVE CATHODIC SPUTTERING [J].
CHEVALLIER, J ;
CHABERT, JP .
THIN SOLID FILMS, 1981, 80 (1-3) :263-263
[9]  
COUTTS TJ, 1978, ACTIVE PASSIVE THIN, pCH3
[10]   EFFECT OF NONSTOICHIOMETRY ON OPTICAL-PROPERTIES OF THIN-FILMS OF TINX [J].
DEMAAYER, PJP ;
MACKENZIE, JD .
PHILOSOPHICAL MAGAZINE, 1976, 34 (06) :1191-1195