MECHANISMS OF REACTIVE SPUTTERING OF TITANIUM NITRIDE AND TITANIUM CARBIDE .3. INFLUENCE OF SUBSTRATE BIAS ON COMPOSITION AND STRUCTURE

被引：120

作者：

SUNDGREN, JE

JOHANSSON, BO

HENTZELL, HTG

KARLSSON, SE

机构：

来源：

THIN SOLID FILMS | 1983年 / 105卷 / 04期

关键词：

D O I：

10.1016/0040-6090(83)90320-6

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：385 / 393

页数：9

共 32 条

[1] PROPERTIES AND COATING RATES OF DIAMOND-LIKE CARBON-FILMS PRODUCED BY RF GLOW-DISCHARGE OF HYDROCARBON GASES [J].

ANDERSSON, LP ;

BERG, S ;

NORSTROM, H ;

OLAISON, R ;

TOWTA, S .

THIN SOLID FILMS, 1979, 63 (01) :155-160

[2] EFFECT OF ION IRRADIATION ON FORMATION, STRUCTURE AND PROPERTIES OF THIN METAL-FILMS [J].

BABAEV, VO ;

BYKOV, JV ;

GUSEVA, MB .

THIN SOLID FILMS, 1976, 38 (01) :1-8

[3] STRESS AND RESISTIVITY CONTROL IN SPUTTERED MOLYBDENUM FILMS AND COMPARISON WITH SPUTTERED GOLD [J].

BLACHMAN, AG .

METALLURGICAL TRANSACTIONS, 1971, 2 (03) :699-&

[4] EFFECT OF ION-BOMBARDMENT DURING DEPOSITION ON THICK METAL AND CERAMIC DEPOSITS [J].

BLAND, RD ;

KOMINIAK, GJ ;

MATTOX, DM .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1974, 11 (04) :671-674

[5]

Chapman B., 1980, GLOW DISCHARGE PROCE

[6]

CUMO JJ, 1977, J VAC SCI TECHNOL, V14, P152

[7] INFLUENCE OF BIAS ON DEPOSITION OF METALLIC-FILMS IN RF AND DC SPUTTERING [J].

CUOMO, JJ ;

GAMBINO, RJ ;

ROSENBER.R .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1974, 11 (01) :34-40

[8] COMPOSITIONALLY MODULATED SPUTTERED INSB-GASB SUPER-LATTICES - CRYSTAL-GROWTH AND INTERLAYER DIFFUSION [J].

ELTOUKHY, AH ;

GREENE, JE .

JOURNAL OF APPLIED PHYSICS, 1979, 50 (01) :505-517

[9] THE EFFECT OF BIAS ON DC AND RF SPUTTERED WC-CO COATINGS [J].

ESER, E ;

OGILVIE, RE ;

TAYLOR, KA .

THIN SOLID FILMS, 1980, 67 (02) :265-277

[10] INTERNAL-STRESSES IN SPUTTERED CHROMIUM [J].

HOFFMAN, DW ;

THORNTON, JA .

THIN SOLID FILMS, 1977, 40 (JAN) :355-363

← 1 2 3 4 →