STRESS AND RESISTIVITY CONTROL IN SPUTTERED MOLYBDENUM FILMS AND COMPARISON WITH SPUTTERED GOLD

被引：94

作者：

BLACHMAN, AG

机构：

来源：

METALLURGICAL TRANSACTIONS | 1971年 / 2卷 / 03期

关键词：

D O I：

10.1007/BF02662724

中图分类号：

TF [冶金工业];

学科分类号：

0806 ;

摘要：

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页码：699 / &

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