SUB-40 NM RESOLUTION 1 KEV SCANNING TUNNELING MICROSCOPE FIELD-EMISSION MICROCOLUMN

被引：37

作者：

KRATSCHMER, E

KIM, HS

THOMSON, MGR

LEE, KY

RISHTON, SA

YU, ML

CHANG, THP

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1994年 / 12卷 / 06期

关键词：

D O I：

10.1116/1.587459

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：3503 / 3507

页数：5

共 9 条

[1] A SCANNING TUNNELING MICROSCOPE CONTROLLED FIELD-EMISSION MICROPROBE SYSTEM
CHANG, THP
KERN, DP
MCCORD, MA
MURAY, LP
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1991, 9 (02): : 438 - 443
[2] ARRAYED MINIATURE ELECTRON-BEAM COLUMNS FOR HIGH THROUGHPUT SUB-100 NM LITHOGRAPHY
CHANG, THP
KERN, DP
MURAY, LP
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1992, 10 (06): : 2743 - 2748
[3] MICROMACHINED ELECTROSTATIC ELECTRON SOURCE
CREWE, DA
PERNG, DC
SHOAF, SE
FEINERMAN, AD
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1992, 10 (06): : 2754 - 2758
[4] JANSEN GH, 1990, ADV ELECTRON ELECT S, V21
[5] OXYGEN PROCESSED FIELD-EMISSION TIPS FOR MICROCOLUMN APPLICATIONS
KIM, HS
YU, ML
STAUFER, U
MURAY, LP
KERN, DP
CHANG, THP
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1993, 11 (06): : 2327 - 2331
[6] LEE KY, 1994, UNPUB 38TH INT S EL
[7] PERFORMANCE-MEASUREMENTS OF A 1-KEV ELECTRON-BEAM MICROCOLUMN
MURAY, LP
STAUFER, U
KERN, DP
CHANG, THP
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1992, 10 (06): : 2749 - 2753
[8] THOMSON MGR, 1994, UNPUB 38TH INT S EL
[9] YAU YW, 1992, J VAC SCI TECHNOL, V11, P1048