MICROSTRUCTURES AND MECHANICAL-PROPERTIES OF THIN-FILMS OF ALUMINUM-OXIDE

被引：71

作者：

CHOU, TC ^{[1
]}

NIEH, TG ^{[1
]}

MCADAMS, SD ^{[1
]}

PHARR, GM ^{[1
]}

机构：

[1] RICE UNIV,DEPT MAT SCI,HOUSTON,TX 77251

来源：

SCRIPTA METALLURGICA ET MATERIALIA | 1991年 / 25卷 / 10期

关键词：

D O I：

10.1016/0956-716X(91)90001-H

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

[No abstract available]

引用

收藏

页码：2203 / 2208

页数：6

相关论文

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