INFLUENCE OF DIFFERENT GROWTH TECHNIQUES ON THE QUALITY OF GAINAS-INP QUANTUM WELL STRUCTURES GROWN BY ADDUCT-MOVPE

被引:13
作者
STREUBEL, K [1 ]
SCHOLZ, F [1 ]
LAUBE, G [1 ]
DIETER, RJ [1 ]
ZIELINSKI, E [1 ]
KEPPLER, F [1 ]
机构
[1] UNIV STUTTGART,INST ANORGAN CHEM,D-7000 STUTTGART 80,FED REP GER
关键词
Crystals--Epitaxial Growth - Photoluminescence - X-Rays--Diffraction;
D O I
10.1016/0022-0248(88)90551-9
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
In this paper the influence of different growth interruption techniques on the interface quality of GaInAs-InP quantum well structures is studied. The structures were grown by atmospheric pressure MOVPE with adducts as Ga and In source materials. They were investigated by X-ray diffraction, photoluminescence and optical gain spectroscopy. Best results were achieved by a short interruption of the growth process at every interface if the uppermost InP surfaces were stabilized by PH3 during this time.
引用
收藏
页码:347 / 352
页数:6
相关论文
共 7 条
[1]   SIMULATION AND GROWTH-RATE UNIFORMITY OF MOVPE INP USING ADDUCTS [J].
FIELD, RJ ;
SCHOLZ, F .
JOURNAL OF CRYSTAL GROWTH, 1988, 88 (03) :371-378
[2]   OPTICAL AND CRYSTALLOGRAPHIC PROPERTIES AND IMPURITY INCORPORATION OF GAXIN1-XAS (0.44 LESS-THAN X LESS-THAN 0.49) GROWN BY LIQUID-PHASE EPITAXY, VAPOR-PHASE EPITAXY, AND METAL ORGANIC-CHEMICAL VAPOR-DEPOSITION [J].
GOETZ, KH ;
BIMBERG, D ;
JURGENSEN, H ;
SELDERS, J ;
SOLOMONOV, AV ;
GLINSKII, GF ;
RAZEGHI, M .
JOURNAL OF APPLIED PHYSICS, 1983, 54 (08) :4543-4552
[3]   ME3IN PREPARATION AND ZONE-REFINING OF ADDUCTS FOR HIGH-QUALITY INP AND GAINAS MOVPE [J].
LAUBE, G ;
KOHLER, U ;
WEIDLEIN, J ;
SCHOLZ, F ;
STREUBEL, K ;
DIETER, RJ ;
KARL, N ;
GERDON, M .
JOURNAL OF CRYSTAL GROWTH, 1988, 93 (1-4) :45-51
[4]   LPE GROWTH OF MISFIT DISLOCATION-FREE THICK IN1-XGAXAS LAYERS ON INP [J].
NAKAJIMA, K ;
KOMIYA, S ;
AKITA, K ;
YAMAOKA, T ;
RYUZAN, O .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1980, 127 (07) :1568-1572
[5]   INP, GAINAS AND QUANTUM-WELL STRUCTURES GROWN BY ADDUCT MOVPE [J].
SCHOLZ, F ;
WIEDEMANN, P ;
NERZ, U ;
BENZ, KW ;
TRANKLE, G ;
LACH, E ;
FORCHEL, A ;
LAUBE, G ;
WEIDLEIN, J .
JOURNAL OF CRYSTAL GROWTH, 1986, 77 (1-3) :564-570
[6]   LONG-WAVELENGTH OPTICAL FIBER COMMUNICATION [J].
SUEMATSU, Y .
PROCEEDINGS OF THE IEEE, 1983, 71 (06) :692-721
[7]   SYSTEMATICS OF LASER OPERATION IN GAAS/ALGAAS MULTIQUANTUM WELL HETEROSTRUCTURES [J].
ZIELINSKI, E ;
SCHWEIZER, H ;
HAUSSER, S ;
STUBER, R ;
PILKUHN, MH ;
WEIMANN, G .
IEEE JOURNAL OF QUANTUM ELECTRONICS, 1987, 23 (06) :969-976