CHARACTERIZATION OF DEFECTS IN HYDROGENATED AMORPHOUS-SILICON DEVICES USING CHARGE COLLECTION SCANNING ELECTRON-MICROSCOPY

被引:2
作者
YACOBI, BG
MATSON, RJ
HERRINGTON, CR
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关键词
D O I
10.1007/BF02655303
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
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页码:843 / 854
页数:12
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