CONTRAST MECHANISMS IN ELECTRON-BEAM IMAGES OF INTERFACE STRUCTURES

被引：12

作者：

BOTTOMS, WR ^{[1
]}

GUTERMAN, D ^{[1
]}

ROITMAN, P ^{[1
]}

机构：

[1] PRINCETON UNIV,DEPT ELECT ENGN,PRINCETON,NJ 08540

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1975年 / 12卷 / 01期

关键词：

D O I：

10.1116/1.568742

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：134 / 139

页数：6

共 16 条

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