INSITU, REAL-TIME DIAGNOSTICS OF OMVPE USING IR-DIODE LASER SPECTROSCOPY

被引：103

作者：

BUTLER, JE

BOTTKA, N

SILLMON, RS

GASKILL, DK

机构：

来源：

JOURNAL OF CRYSTAL GROWTH | 1986年 / 77卷 / 1-3期

关键词：

D O I：

10.1016/0022-0248(86)90297-6

中图分类号：

O7 [晶体学];

学科分类号：

0702 ; 070205 ; 0703 ; 080501 ;

摘要：

引用

页码：163 / 171

页数：9

共 24 条

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YAMADA, C ;

HIROTA, E .

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YOSHIDA, M ;

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UESUGI, F .

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