APPLICATIONS OF ENERGY-LOSS CONTRAST STIM

被引:17
作者
BENCH, G [1 ]
SAINT, A [1 ]
LEGGE, GJF [1 ]
CHOLEWA, M [1 ]
机构
[1] UNIV MELBOURNE,SCH PHYS,MICROANALYT RES CTR,PARKVILLE,VIC 3052,AUSTRALIA
基金
澳大利亚研究理事会;
关键词
D O I
10.1016/0168-583X(93)95541-C
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
Scanning transmission ion microscopy (STIM) with energy loss contrast is a quantitative imaging technique. A focussed MeV ion microbeam is scanned over the sample and measured energy losses of residual ions at each beam location are used to provide the contrast in the image. The technique is highly efficient as almost every ion carries useful information from which quantitative data can be obtained. The high efficiency of data collection at present necessitates the use of small beam currents. Therefore small apertures can be used and fine spatial resolution can be achieved. High efficiency also makes it possible to collect large data sets for high definition imaging with a small radiation dose. Owing to the simple relationship between energy loss and areal density, STIM with energy loss contrast can provide a quantitative image that can be used to obtain areal density information on the sample. These areal density maps can be used not only to provide a high resolution image of the sample but also to normalise particle induced X-ray emission (PIXE) data. The small radiation dose required to form these areal density maps also allows one to use STIM with energy loss contrast to quantitatively monitor ion beam induced specimen changes caused by higher doses and dose rates used in other microanalytical techniques. STIM with energy loss contrast also provides the possibility of stereo imaging and ion microtomography. STIM has also been used in conjunction with channeling to explore transmission channeling in thin crystals. This paper will discuss these applications of STIM with energy loss contrast and look at further developments from them.
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页码:175 / 183
页数:9
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