CHANNELING SCANNING-TRANSMISSION ION MICROSCOPY

被引：23

作者：

CHOLEWA, M ^{[1
]}

BENCH, G ^{[1
]}

LEGGE, GJF ^{[1
]}

SAINT, A ^{[1
]}

机构：

[1] UNIV MELBOURNE,SCH PHYS,MICRO ANALYT RES CTR,PARKVILLE,VIC 3052,AUSTRALIA

来源：

APPLIED PHYSICS LETTERS | 1990年 / 56卷 / 13期

关键词：

D O I：

10.1063/1.102524

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Scanning transmission ion microscopy (STIM) has been used, in conjunction with channeling, to explore transmission channeling in 50-μm-thick epitaxially grown n-type silicon with 3.9 MeV H+ beam currents of 0.1 fA focused to spot sizes of less than 200 nm. The technique is extremely efficient, causes negligible damage, and is capable of very high resolution. High-resolution images of crystal damage were obtained with this first demonstration of channeling contrast in STIM.

引用

页码：1236 / 1238

页数：3

共 11 条

[1] Andersen H. H., 1977, HYDROGEN STOPPING PO
[2] CHANNELING EFFECTS IN ENERGY LOSS OF 3-11-MEV PROTONS IN SILICON AND GERMANIUM SINGLE CRYSTALS
APPLETON, BR
ERGINSOY, C
GIBSON, WM
[J]. PHYSICAL REVIEW, 1967, 161 (02): : 330 - &
[3] HIGH-RESOLUTION STIM
BENCH, GS
LEGGE, GJF
[J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1989, 40-1 : 655 - 658
[4] PROTON MICROBEAMS, THEIR PRODUCTION AND USE
COOKSON, JA
FERGUSON, AT
PILLING, FD
[J]. JOURNAL OF RADIOANALYTICAL CHEMISTRY, 1972, 12 (01): : 39 - 52
[5] SEMICONDUCTOR ANALYSIS WITH A CHANNELED HELIUM MICROBEAM
INGARFIELD, SA
MCKENZIE, CD
SHORT, KT
WILLIAMS, JS
[J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, 1981, 191 (1-3): : 521 - 526
[6] TOTAL QUANTITATIVE RECORDING OF ELEMENTAL MAPS AND SPECTRA WITH A SCANNING MICROPROBE
LEGGE, GJF
HAMMOND, I
[J]. JOURNAL OF MICROSCOPY-OXFORD, 1979, 117 (NOV): : 201 - 210
[7] CHANNELING CONTRAST MICROSCOPY - APPLICATION TO SEMICONDUCTOR STRUCTURES
MCCALLUM, JC
MCKENZIE, CD
LUCAS, MA
ROSSITER, KG
SHORT, KT
WILLIAMS, JS
[J]. APPLIED PHYSICS LETTERS, 1983, 42 (09) : 827 - 829
[8] ENERGY-LOSS RADIOGRAPHY WITH A SCANNING MEV-ION MICROPROBE
OVERLEY, JC
CONNOLLY, RC
SIEGER, GE
MACDONALD, JD
LEFEVRE, HW
[J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, 1983, 218 (1-3): : 43 - 46
[9] SATTLER AR, 1967, PHYS REV, V161, P161
[10] THE USE OF HE MICROBEAMS FOR LIGHT-ELEMENT X-RAY-ANALYSIS OF BIOLOGICAL TISSUE
SEALOCK, RM
MAZZOLINI, AP
LEGGE, GJF
[J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, 1983, 218 (1-3): : 217 - 220

← 1 2 →