THICKNESS DEPENDENCE OF OPTICAL GAP AND VOID FRACTION FOR SPUTTERED AMORPHOUS-GERMANIUM

被引：38

作者：

PILIONE, LJ

VEDAM, K

YEHODA, JE

MESSIER, R

MCMARR, PJ

机构：

[1] USN,RES LAB,WASHINGTON,DC 20375

[2] PENN STATE UNIV,DEPT PHYS,ALTOONA,PA 16603

来源：

PHYSICAL REVIEW B | 1987年 / 35卷 / 17期

关键词：

D O I：

10.1103/PhysRevB.35.9368

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：9368 / 9371

页数：4

共 14 条

[1] INVESTIGATION OF EFFECTIVE-MEDIUM MODELS OF MICROSCOPIC SURFACE-ROUGHNESS BY SPECTROSCOPIC ELLIPSOMETRY [J].

ASPNES, DE ;

THEETEN, JB .

PHYSICAL REVIEW B, 1979, 20 (08) :3292-3302

[2] THICKNESS DEPENDENT CONDUCTIVITY OF N-TYPE HYDROGENATED AMORPHOUS-SILICON [J].

AST, DG ;

BRODSKY, MH .

JOURNAL OF NON-CRYSTALLINE SOLIDS, 1980, 35-6 (JAN-) :611-616

[3] SPECTROSCOPIC ELLIPSOMETRY STUDY OF GLOW-DISCHARGE-DEPOSITED THIN-FILMS OF A-GE-H [J].

BLANCO, JR ;

MCMARR, PJ ;

VEDAM, K ;

ROSS, RC .

JOURNAL OF APPLIED PHYSICS, 1986, 60 (10) :3724-3731

[4] DENSITY OF AMORPHOUS-GERMANIUM FILMS BY SPECTROSCOPIC ELLIPSOMETRY [J].

BLANCO, JR ;

MCMARR, PJ ;

YEHODA, JE ;

VEDAM, K ;

MESSIER, R .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1986, 4 (03) :577-582

[5]

CODY CD, 1980, J NONCRYST SOLIDS, V35, P563

[6] STRUCTURAL AND OPTICAL-PROPERTIES OF AMORPHOUS-GERMANIUM - AMORPHOUS-GERMANIUM .3. OPTICAL-PROPERTIES [J].

CONNELL, GAN ;

TEMKIN, RJ ;

PAUL, W .

ADVANCES IN PHYSICS, 1973, 22 (05) :643-665

[7]

CONNELL GAN, 1985, SPRINGER TOPICS APPL, V36, P73

[8] OPTICAL EVIDENCE FOR A NETWORK OF CRACKLIKE VOIDS IN AMORPHOUS GERMANIUM [J].

GALEENER, FL .

PHYSICAL REVIEW LETTERS, 1971, 27 (25) :1716-&

[9] THICKNESS DEPENDENCE OF ELECTRICAL AND OPTICAL-PROPERTIES AND ELECTRON-SPIN-RESONANCE IN UNDOPED A-SI-H [J].

HASEGAWA, S ;

IMAI, Y .

PHILOSOPHICAL MAGAZINE B-PHYSICS OF CONDENSED MATTER STATISTICAL MECHANICS ELECTRONIC OPTICAL AND MAGNETIC PROPERTIES, 1982, 46 (03) :239-251

[10] THICKNESS-DEPENDENT VOID FRACTION OF RF-SPUTTERED AMORPHOUS-GE FILMS BY SPECTROSCOPIC ELLIPSOMETRY [J].

MCMARR, PJ ;

BLANCO, JR ;

VEDAM, K ;

MESSIER, R ;

PILIONE, L .

APPLIED PHYSICS LETTERS, 1986, 49 (06) :328-330

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