DENSITY OF AMORPHOUS-GERMANIUM FILMS BY SPECTROSCOPIC ELLIPSOMETRY

被引：39

作者：

BLANCO, JR

MCMARR, PJ

YEHODA, JE

VEDAM, K

MESSIER, R

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1986年 / 4卷 / 03期

关键词：

D O I：

10.1116/1.573851

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：577 / 582

页数：6

共 48 条

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