RADIATION-DAMAGE IN TIOX AT HIGH-CURRENT DENSITY

被引:46
作者
BERGER, SD
MACAULAY, JM
BROWN, LM
机构
[1] Univ of Cambridge, Cambridge, Engl, Univ of Cambridge, Cambridge, Engl
关键词
D O I
10.1080/09500838708214705
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
11
引用
收藏
页码:179 / 185
页数:7
相关论文
共 11 条
[1]   ELECTRON ENERGY-LOSS SPECTROSCOPY STUDIES OF NANOMETER-SCALE STRUCTURES IN ALUMINA PRODUCED BY INTENSE ELECTRON-BEAM IRRADIATION [J].
BERGER, SD ;
SALISBURY, IG ;
MILNE, RH ;
IMESON, D ;
HUMPHREYS, CJ .
PHILOSOPHICAL MAGAZINE B-PHYSICS OF CONDENSED MATTER STATISTICAL MECHANICS ELECTRONIC OPTICAL AND MAGNETIC PROPERTIES, 1987, 55 (03) :341-358
[2]  
BROERS AN, 1978, 9TH P INT C EL MICR, V3, P343
[3]  
GRANT FA, 1958, REV MOD PHYS, V31, P646
[4]  
Humphreys C. J., 1985, I PHYS C SER, V78, P1
[5]   STIMULATED DESORPTION [J].
KNOTEK, ML .
REPORTS ON PROGRESS IN PHYSICS, 1984, 47 (11) :1499-1561
[6]   STUDY OF THE L23 EDGES IN THE 3D TRANSITION-METALS AND THEIR OXIDES BY ELECTRON-ENERGY-LOSS SPECTROSCOPY WITH COMPARISONS TO THEORY [J].
LEAPMAN, RD ;
GRUNES, LA ;
FEJES, PL .
PHYSICAL REVIEW B, 1982, 26 (02) :614-635
[7]   METAL-INSULATOR TRANSITION [J].
MOTT, NF .
REVIEWS OF MODERN PHYSICS, 1968, 40 (04) :677-&
[8]   RADIOLYSIS AND RESOLUTION LIMITS OF INORGANIC HALIDE RESISTS [J].
MURAY, A ;
SCHEINFEIN, M ;
ISAACSON, M ;
ADESIDA, I .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1985, 3 (01) :367-372
[9]   NANOMETER SCALE ELECTRON-BEAM LITHOGRAPHY IN INORGANIC MATERIALS [J].
SALISBURY, IG ;
TIMSIT, RS ;
BERGER, SD ;
HUMPHREYS, CJ .
APPLIED PHYSICS LETTERS, 1984, 45 (12) :1289-1291
[10]   ELECTRON-ENERGY LOSS SPECTROSCOPY ACROSS A METAL-INSULATOR INTERFACE AT SUB-NANOMETER SPATIAL-RESOLUTION [J].
SCHEINFEIN, M ;
MURAY, A ;
ISAACSON, M .
ULTRAMICROSCOPY, 1985, 16 (02) :233-239