TOF ERD EXPERIMENTS USING A 10 MEV CL-35 BEAM

An analysis system has been established for stoichiometry of thin layers composed of chemical elements which range from light elements to medium-heavy ones such as Fe. A beam of 10 MeV Cl-35 was used to recoil nuclei from the target. The mass of recoils has been identified by a counter telescope which consists of two timing detectors for time of flight (TOF) and a surface barrier detector (SBD) for energy measurement of each particle. The detection efficiency of the TOF spectrometer was determined as a function of atomic number Z for light elements up to chlorine. Experimental results are reported for LiF/Si, BF2-implanted SiO2/Si and FeO(x)/C samples. Factors which affect the accuracy of the present method are discussed.