EPITAXIAL LINBO3 THIN-FILMS PREPARED BY A SOL-GEL PROCESS

被引:71
作者
NASHIMOTO, K
CIMA, MJ
机构
[1] Ceramics Processing Research Laboratory, Massachusetts Institute of Technology, Cambridge
关键词
D O I
10.1016/0167-577X(91)90151-U
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
LiNbO3 thin films were prepared on sapphire substrates by a sol-gel process using lithium ethoxide and niobium pentaethoxide. Decreasing the amount of water added for hydrolysis of the alkoxides caused the films to show a higher preferred orientation in the same crystal plane as the orientation of the substrate. Without the addition of water to the alkoxides, a heteroepitaxial film with single-crystal nature was obtained. Films of this quality have not been reported previously.
引用
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页码:348 / 354
页数:7
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