SPUTTERING AND STRESS IN ION BOMBARDED AU AND GE FILMS

被引：8

作者：

CHERECKDJIAN, S

WILSON, IH

机构：

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1986年 / 13卷 / 1-3期

关键词：

D O I：

10.1016/0168-583X(86)90541-0

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：426 / 433

页数：8

共 21 条

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