FORMATION OF THIN FILMS OF SILICA BY ELECTRON BOMBARDMENT OF TRIPHENYLSILANOL

被引:13
作者
WOODMAN, TP
机构
来源
BRITISH JOURNAL OF APPLIED PHYSICS | 1965年 / 16卷 / 03期
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D O I
10.1088/0508-3443/16/3/310
中图分类号
O59 [应用物理学];
学科分类号
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页码:359 / &
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共 16 条
[1]   LOW-TEMPERATURE DEPOSITION OF SILICON OXIDE FILMS [J].
ALT, LL ;
ING, SW ;
LAENDLE, KW .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1963, 110 (05) :465-465
[2]   THE USE OF AN INTERFERENCE MICROSCOPE FOR MEASUREMENT OF EXTREMELY THIN SURFACE LAYERS [J].
BOND, WL ;
SMITS, FM .
BELL SYSTEM TECHNICAL JOURNAL, 1956, 35 (05) :1209-1221
[3]   ELECTRICAL PROPERTIES OF THIN ORGANIC FILMS [J].
BRADLEY, A ;
HAMMES, JP .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1963, 110 (01) :15-22
[4]   DER AUFBAU VON GLIMMENTLADUNGS-POLYMERISATEN VERSCHIEDENER ENTSTEHUNGSBEDINGUNGEN UND SEINE VERANDERUNG DURCH ELEKTRONENBESTRAHLUNG [J].
BROCKES, A ;
KONIG, H .
ZEITSCHRIFT FUR PHYSIK, 1958, 152 (01) :75-86
[5]   CONDUCTING THIN FILMS FORMED BY ELECTRON BOMBARDMENT OF SUBSTRATE [J].
CHRISTY, RW .
JOURNAL OF APPLIED PHYSICS, 1962, 33 (05) :1884-&
[6]   FORMATION OF THIN POLYMER FILMS BY ELECTRON BOMBARDMENT [J].
CHRISTY, RW .
JOURNAL OF APPLIED PHYSICS, 1960, 31 (09) :1680-1683
[7]   THE SOURCES OF ELECTRON-INDUCED CONTAMINATION IN KINETIC VACUUM SYSTEMS [J].
ENNOS, AE .
BRITISH JOURNAL OF APPLIED PHYSICS, 1954, 5 (JAN) :27-31
[8]  
HAEFER R, 1956, 3 P INT C EL MICR, P466
[9]   UBER DUNNE AUS KOHLENWASSERSTOFFEN DURCH ELEKTRONENBESCHUSSGEBILDETE ODER LONENBESCHUSS GEBILDETE SCHICHTEN [J].
KONIG, H ;
HELWIG, G .
ZEITSCHRIFT FUR PHYSIK, 1951, 129 (05) :491-503
[10]  
LAROCQUE AP, 1962, IRE T COMPON PARTS, V9, P96