PIEZOELECTRIC BIMORPH-BASED TRANSLATION DEVICE FOR TWO-DIMENSIONAL, REMOTE MICROPOSITIONING

被引：11

作者：

PETERS, DJ

BLACKFORD, BL

机构：

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 1989年 / 60卷 / 01期

关键词：

D O I：

10.1063/1.1140571

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：138 / 140

页数：3

共 8 条

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JERICHO, MH .

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[3]

GERMANO CP, 1971, IEEE T AUDIO ELECTRO, V19, P1

[4]

MAMIN HJ, 1985, REV SCI INSTRUM, V56, P11

[5] SIMPLE PIEZOELECTRIC TRANSLATION DEVICE [J].

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EMCH, R ;

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REVIEW OF SCIENTIFIC INSTRUMENTS, 1988, 59 (02) :368-369

[6]

PETERS DJ, 1988, THESEIS DYTHESIS DAL

[7] DYNAMIC PIEZOELECTRIC TRANSLATION DEVICES [J].

POHL, DW .

REVIEW OF SCIENTIFIC INSTRUMENTS, 1987, 58 (01) :54-57

[8] HIGH-STABILITY SCANNING TUNNELING MICROSCOPE [J].

VANDEWALLE, GFA ;

GERRITSEN, JW ;

VANKEMPEN, H ;

WYDER, P .

REVIEW OF SCIENTIFIC INSTRUMENTS, 1985, 56 (08) :1573-1576

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