MACROSCOPIC AXIAL DOPANT DISTRIBUTION IN CZOCHRALSKI SILICON-CRYSTALS GROWN IN A VERTICAL MAGNETIC-FIELD

被引：9

作者：

HIRATA, H

INOUE, N

机构：

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS | 1985年 / 24卷 / 11期

关键词：

D O I：

10.1143/JJAP.24.1399

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1399 / 1403

页数：5

共 17 条

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