SPUTTER DEPOSITION AND MAGNETIC-PROPERTIES OF MN-ZN FERRITE FILMS COMPOSED OF (111) PLANE ORIENTED CRYSTALLITES

被引：15

作者：

MATSUOKA, M ^{[1
]}

MATSUDA, Y ^{[1
]}

HOSHI, Y ^{[1
]}

NAOE, M ^{[1
]}

机构：

[1] TOKYO INST TECHNOL,MEGURO KU,TOKYO 152,JAPAN

来源：

JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS | 1986年 / 54-7卷

关键词：

CRYSTALS - Orientation - MANGANESE COMPOUNDS - Thin Films - SPUTTERING;

D O I：

10.1016/0304-8853(86)90942-X

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Mn-Zn ferrite thin films with soft magnetic properties composed of (111) plane well-oriented crystallites have been reproducibly prepared on c-axis well-oriented ZnO sputtered layers at low temperatures of about 400 degree C, using a Targets Facing Type of Sputtering (TFTS) system. The preparation process and soft magnetic properties have been investigated in detail.

引用

页码：1603 / 1604

页数：2