MINIATURE ELECTRON-OPTICAL COLUMNS

被引：16

作者：

CHANG, THP

KERN, DP

MURAY, LP

机构：

[1] IBM Thomas J. Watson Research Center, York-town Heights

来源：

IEEE TRANSACTIONS ON ELECTRON DEVICES | 1991年 / 38卷 / 10期

关键词：

D O I：

10.1109/16.88511

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Miniaturized electron-optical systems based on a field emission microsource and a microlens for probe forming have been studied. The performance of systems with dimensions (length and diameter) in the submillimeter to millimeters range can exceed that of a conventional system over a wide range of potentials (100 V to 10 kV) and working distances (up to 10 mm).

引用

页码：2284 / 2288

页数：5

共 20 条

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