REDEPOSITION OF SPUTTERED SPECIES BY ELECTRIC-FIELDS OF AN INCIDENT ION-BEAM AND SPUTTERED ION

被引:5
作者
HELBIG, HF
ADELMANN, PJ
MILLER, AC
CZANDERNA, AW
机构
[1] CLARKSON COLL TECHNOL,DEPT PHYS,POTSDAM,NY 13676
[2] CLARKSON COLL TECHNOL,INST COLLOID & SURFACE SCI,POTSDAM,NY 13676
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1976年 / 13卷 / 01期
关键词
D O I
10.1116/1.568894
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:379 / 383
页数:5
相关论文
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