RANDOM SPECTRUM FOR THE CHANNELING-BACKSCATTERING TECHNIQUE - A ROTATING AXIAL-DIP STUDY

被引：20

作者：

DYGO, A ^{[1
]}

LENNARD, WN ^{[1
]}

MITCHELL, IV ^{[1
]}

SMULDERS, PJM ^{[1
]}

机构：

[1] UNIV GRONINGEN,CTR MAT SCI,NVSF,9747 AG GRONINGEN,NETHERLANDS

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1994年 / 84卷 / 01期

关键词：

D O I：

10.1016/0168-583X(94)95698-7

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

The (100) axial channeling dip for a Si single crystal, obtained by averaging over azimuthal angles, is studied experimentally and by Monte Carlo simulation for tilt angles theta up to 16-degrees using a 1.5 MeV energy He-4+ ion beam. Both in the experiment and the simulation, the dip shape is found to be in a quantitative agreement with the rule of angular compensation; the influence of the (100) axis extends to theta almost-equal-to 6-degrees. Surprisingly strong fine structure in the yield, with a number of distinct secondary dips, is observed for theta > 6-degrees. It is shown that this structure is related to some high-index crystallographic planes being nearly tangent to the azimuthal scans at certain tilts. Good agreement between the experiment and simulation is obtained at all tilt angles investigated. Consequences for the random yield determination in channeling studies are discussed.

引用

页码：23 / 30

页数：8

共 21 条

[1] STUDIES OF DEFECTS AND SURFACES BY CHANNELING [J].

BARRETT, JH .

NUCLEAR INSTRUMENTS & METHODS, 1978, 149 (1-3) :341-348

[2] MONTE CARLO CHANNELING CALCULATIONS [J].

BARRETT, JH .

PHYSICAL REVIEW B, 1971, 3 (05) :1527-&

[3]

BLOOD P, 1978, NUCL INSTRUM METHODS, V148, P225

[4]

Chu W.-K., 1978, BACKSCATTERING SPECT

[5] SURFACE STUDIES OF A(III)B(V) COMPOUND SEMICONDUCTORS BY ION CHANNELING [J].

DYGO, A ;

TUROS, A .

PHYSICAL REVIEW B, 1989, 40 (11) :7704-7713

[6] SIMULATION ANALYSIS OF ION CHANNELING SPECTRA - THERMAL VIBRATIONAL AMPLITUDE IN SI [J].

DYGO, A ;

SMULDERS, PJM ;

BOERMA, DO .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1992, 64 (1-4) :701-705

[7] CHANNELING MEASUREMENTS METHODOLOGY [J].

DYGO, A ;

LENNARD, WN ;

MITCHELL, IV .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1993, 74 (04) :581-596

[8]

DYGO A, UNPUB

[9]

FELDMAN LC, 1982, MATERIALS ANAL ION C, P41103

[10] CHANNELING AND RELATED EFFECTS IN MOTION OF CHARGED-PARTICLES THROUGH CRYSTALS [J].

GEMMELL, DS .

REVIEWS OF MODERN PHYSICS, 1974, 46 (01) :129-227

← 1 2 3 →