CYLINDRICAL MAGNETRON DISCHARGES .1. CURRENT-VOLTAGE CHARACTERISTICS FOR DC-DRIVEN AND RF-DRIVEN DISCHARGE SOURCES

被引：68

作者：

YEOM, GY

THORNTON, JA

KUSHNER, MJ

机构：

[1] UNIV ILLINOIS,GASEOUS ELECTR LAB,607 E HEALEY,CHAMPAIGN,IL 61820

[2] UNIV ILLINOIS,COORDINATED SCI LAB,COORDINATED SCI LAB,URBANA,IL 61801

来源：

JOURNAL OF APPLIED PHYSICS | 1989年 / 65卷 / 10期

关键词：

D O I：

10.1063/1.343395

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：3816 / 3824

页数：9

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