THERMAL-STABILITY OF AL/ALGAAS AND AL/GAAS/ALGAAS(MBE) SCHOTTKY BARRIERS

被引:9
作者
BOSACCHI, A [1 ]
FRANCHI, S [1 ]
GOMBIA, E [1 ]
MOSCA, R [1 ]
FANTINI, F [1 ]
FRANCHI, S [1 ]
MENOZZI, R [1 ]
机构
[1] UNIV PARMA,DEPT INFORMAT ENGN,I-43100 PARMA,ITALY
关键词
SCHOTTKY BARRIER DEVICES; SEMICONDUCTORS;
D O I
10.1049/el:19930436
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Outstanding stability has been observed in Al/AlxGa1-xAs and Al/GaAs/AlxGa1-xAs (x = 0.25) Schottky barriers prepared by depositing Al in situ by MBE on annealing up to 400-degrees-C. Conventionally evaporated barriers have been fabricated and compared with epitaxial ones. The changes in barrier height and ideality factor induced by annealing are reported.
引用
收藏
页码:651 / 653
页数:3
相关论文
共 7 条
[1]   INSITU, NEAR-IDEAL EPITAXIAL AL/ALXGA1-XAS SCHOTTKY BARRIERS FORMED BY MOLECULAR-BEAM EPITAXY [J].
MISSOUS, M ;
TRUSCOTT, WS ;
SINGER, KE .
JOURNAL OF APPLIED PHYSICS, 1990, 68 (05) :2239-2245
[2]   THERMAL-STABILITY OF EPITAXIAL AL-GAAS SCHOTTKY BARRIERS PREPARED BY MOLECULAR-BEAM EPITAXY [J].
MISSOUS, M ;
RHODERICK, EH ;
SINGER, KE .
JOURNAL OF APPLIED PHYSICS, 1986, 59 (09) :3189-3195
[3]   ANNEALING OF INTIMATE AG, AL, AND AU-GAAS SCHOTTKY BARRIERS [J].
NEWMAN, N ;
CHIN, KK ;
PETRO, WG ;
KENDELEWICZ, T ;
WILLIAMS, MD ;
MCCANTS, CE ;
SPICER, WE .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1985, 3 (03) :996-1001
[4]   FREQUENCY-DEPENDENCE OF CAPACITANCE-VOLTAGE CHARACTERISTICS CAUSED BY DX CENTERS IN SI-DOPED ALGAAS [J].
OHORI, T ;
TAKIKAWA, M ;
KOMENO, J .
JOURNAL OF APPLIED PHYSICS, 1988, 63 (04) :1223-1224
[5]  
SUN DC, 1981, I PHYS C SER, V63, P311
[6]  
SUN DC, 1981, I PHYS C SERIES, V63, P317
[7]   THE DEPENDENCE OF AL SCHOTTKY-BARRIER HEIGHT ON SURFACE CONDITIONS OF GAAS AND ALAS GROWN BY MOLECULAR-BEAM EPITAXY [J].
WANG, WI .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1983, 1 (03) :574-580