DESIGN OF A SAFE FACILITY FOR THE METALORGANIC CHEMICAL VAPOR-DEPOSITION OF HIGH-PURITY GAAS AND ALGAAS

被引：9

作者：

MESSHAM, RL ^{[1
]}

TUCKER, WK ^{[1
]}

机构：

[1] AIRCO SPECIAL GASES,DELRAN,NJ 08075

来源：

关键词：

D O I：

10.1016/0022-0248(86)90289-7

中图分类号：

O7 [晶体学];

学科分类号：

0702 ; 070205 ; 0703 ; 080501 ;

摘要：

引用

页码：101 / 107

页数：7

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