THE EFFECT OF IMPLANTATION ON EXPLOSIVELY CRYSTALLIZED A-SI

被引：10

作者：

BENSAHEL, D

AUVERT, G

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1983年 / 54卷 / 01期

关键词：

D O I：

10.1063/1.331715

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：392 / 394

页数：3

共 6 条

[1] EXPLOSIVE CRYSTALLIZATION OF A-SI FILMS IN BOTH THE SOLID AND LIQUID-PHASES [J].

AUVERT, G ;

BENSAHEL, D ;

PERIO, A ;

NGUYEN, VT ;

ROZGONYI, GA .

APPLIED PHYSICS LETTERS, 1981, 39 (09) :724-726

[2]

Auvert G., 1982, Laser and Electron Beam Interactions with Solids. Proceedings of the Materials Research Society Annual Meeting, P535

[3] INFLUENCE OF CW LASER SCAN SPEED IN SOLID-PHASE CRYSTALLIZATION OF AMORPHOUS SI FILM ON SI3N4-GLASS SUBSTRATE [J].

AUVERT, G ;

BENSAHEL, D ;

GEORGES, A ;

NGUYEN, VT ;

HENOC, P ;

MORIN, F ;

COISSARD, P .

APPLIED PHYSICS LETTERS, 1981, 38 (08) :613-615

[4]

Bensahel D., 1982, Laser and Electron Beam Interactions with Solids. Proceedings of the Materials Research Society Annual Meeting, P541

[5] EXPLOSIVE CRYSTALLIZATION OF AMORPHOUS-GERMANIUM [J].

LEAMY, HJ ;

BROWN, WL ;

CELLER, GK ;

FOTI, G ;

GILMER, GH ;

FAN, JCC .

APPLIED PHYSICS LETTERS, 1981, 38 (03) :137-139

[6] AMORPHOUS-CRYSTALLINE BOUNDARY DYNAMICS IN CW LASER CRYSTALLIZATION [J].

ZEIGER, HJ ;

FAN, JCC ;

PALM, BJ ;

CHAPMAN, RL ;

GALE, RP .

PHYSICAL REVIEW B, 1982, 25 (06) :4002-4018

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