A 60 KEV IMPLANTER FOR METALS

被引：10

作者：

LEUTENECKER, R

RYSSEL, H

ZELLER, KH

SPOHRLE, HP

机构：

来源：

MATERIALS SCIENCE AND ENGINEERING | 1985年 / 69卷 / 02期

关键词：

D O I：

10.1016/0025-5416(85)90348-9

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：465 / 472

页数：8

共 8 条

[1]

Dearnaley G., 1983, Ion Implantation: Equipment and Techniques. Proceedings of the Fourth International Conference, P332

[2]

DENHOLM A, 1984, UNPUB NUCL INSTRUM M

[3]

DEUTCHMAN AH, 1983, UNPUB SURFACE ENG

[4] WEAR-RESISTANCE OF NITROGEN-IMPLANTED STEELS [J].

DIMIGEN, H ;

KOBS, K ;

LEUTENECKER, R ;

RYSSEL, H ;

EICHINGER, P .

MATERIALS SCIENCE AND ENGINEERING, 1985, 69 (01) :181-190

[5] TRIBO-ENHANCED DIFFUSION OF NITROGEN IMPLANTED INTO STEEL [J].

FELLER, HG ;

KLINGER, R ;

BENECKE, W .

MATERIALS SCIENCE AND ENGINEERING, 1985, 69 (01) :173-180

[6]

FROMSON RE, 1983, ION IMPLANTATION EQU, P31

[7] PRODUCTION OF HIGH-CURRENT METAL-ION BEAMS [J].

HIRVONEN, JK ;

CAROSELLA, CA ;

HUBLER, GK .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, 1981, 189 (01) :103-106

[8]

Kranz H., 1983, Ion Implantation: Equipment and Techniques. Proceedings of the Fourth International Conference, P172

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