RESUSCITATION OF CARBON-CONTAMINATED MIRRORS AND GRATINGS BY OXYGEN-DISCHARGE CLEANING .1. EFFICIENCY RECOVERY IN THE 4-40-EV RANGE

被引：23

作者：

KOIDE, T

YANAGIHARA, M

AIURA, Y

SATO, S

SHIDARA, T

FUJIMORI, A

FUKUTANI, H

NIWANO, M

KATO, H

机构：

[1] TOKYO METROPOLITAN UNIV, DEPT PHYS, SETAGAYA KU, TOKYO 158, JAPAN

[2] UNIV TSUKUBA, INST PHYS, SAKURA, IBARAKI 305, JAPAN

[3] NATL INST RES INORGAN MAT, SAKURA, IBARAKI 305, JAPAN

[4] MIYAGI UNIV EDUC, SENDAI, MIYAGI 980, JAPAN

来源：

APPLIED OPTICS | 1987年 / 26卷 / 18期

关键词：

D O I：

10.1364/AO.26.003884

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

引用

页码：3884 / 3894

页数：11

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