HIGH K BATIO3 FILMS FROM METALLOORGANIC PRECURSORS

被引：62

作者：

XU, JJ

SHAIKH, AS

VEST, RW

机构：

[1] PURDUE UNIV,TURNER LAB,W LAFAYETTE,IN 47907

[2] FERRO CORP,DIV ELECTR MAT,SANTA BARBARA,CA 93117

来源：

IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL | 1989年 / 36卷 / 03期

关键词：

D O I：

10.1109/58.19168

中图分类号：

O42 [声学];

学科分类号：

070206 ; 082403 ;

摘要：

引用

收藏

页码：307 / 312

页数：6

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