STABILITY OF AMORPHOUS FE-W ALLOYS IN MULTILAYER METALLIZATIONS ON SILICON

被引：28

作者：

SUNI, I

NICOLET, MA

PAI, CS

LAU, SS

机构：

[1] CALTECH,PASADENA,CA 91125

[2] UNIV CALIF SAN DIEGO,LA JOLLA,CA 92093

来源：

THIN SOLID FILMS | 1983年 / 107卷 / 01期

关键词：

D O I：

10.1016/0040-6090(83)90009-3

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：73 / 80

页数：8

共 7 条

[1] AMORPHOUS THIN-FILM DIFFUSION-BARRIERS ON GAAS AND INP [J].

ANDERSON, WT ;

CHRISTOU, A ;

DAVEY, JE .

THIN SOLID FILMS, 1983, 104 (1-2) :57-67

[2]

GOLTS G, 1981, METASTABLE MATERIALS, P227

[3] DIFFUSION-BARRIERS IN LAYERED CONTACT STRUCTURES [J].

NICOLET, MA ;

BARTUR, M .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1981, 19 (03) :786-793

[4]

Nicolet MA, 1983, VLSI ELECTRONICS MIC, V6, P330

[5] PHASE-SEPARATION IN ALLOY-SI INTERACTION [J].

OTTAVIANI, G ;

TU, KN ;

MAYER, JW ;

TSAUR, BY .

APPLIED PHYSICS LETTERS, 1980, 36 (04) :331-333

[6]

WANG R, 1978, 4TH P INT C RAP QUEN

[7] AMORPHOUS METALLIZATIONS FOR HIGH-TEMPERATURE SEMICONDUCTOR-DEVICE APPLICATIONS [J].

WILEY, JD ;

PEREPEZKO, JH ;

NORDMAN, JE ;

GUO, KJ .

IEEE TRANSACTIONS ON INDUSTRIAL ELECTRONICS, 1982, 29 (02) :154-157

← 1 →