HETEROEPITAXY OF GE-76 FILMS ON GAAS BY DIRECT DEPOSITION FROM A LOW-ENERGY ION-BEAM

被引:7
作者
HAYNES, TE
ZUHR, RA
PENNYCOOK, SJ
LARSON, BC
APPLETON, BR
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1989年 / 7卷 / 03期
关键词
D O I
10.1116/1.576288
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
引用
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页码:1372 / 1377
页数:6
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