THE FORMATION AND STRUCTURE OF CVD W FILMS PRODUCED BY THE SI REDUCTION OF WF6

被引：43

作者：

GREEN, ML

ALI, YS

BOONE, T

DAVIDSON, BA

FELDMAN, LC

NAKAHARA, S

机构：

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1987年 / 134卷 / 09期

关键词：

D O I：

10.1149/1.2100872

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：2285 / 2292

页数：8

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