HIGH-RATE MAGNETRON SPUTTERING OF FERROMAGNETIC SMCO, FE AND COCR THIN-FILMS

被引：9

作者：

ROLL, K

KUKLA, R

MAYR, M

MUNZ, WD

机构：

来源：

IEEE TRANSACTIONS ON MAGNETICS | 1984年 / 20卷 / 01期

关键词：

D O I：

10.1109/TMAG.1984.1063030

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：63 / 65

页数：3

共 7 条

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[2] NITROGEN-INDUCED FCC PHASE IN RF SPUTTERED CO-CR FILMS HAVING THE HCP PHASE AND PERPENDICULAR MAGNETIC-ANISOTROPY [J].

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[3] PERPENDICULAR MAGNETIC RECORDING [J].

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[4] STUDIES OF THE PERPENDICULAR MAGNETIZATION MODE IN CO-CR SPUTTERED FILMS [J].

IWASAKI, SI ;

OUCHI, K ;

HONDA, N .

IEEE TRANSACTIONS ON MAGNETICS, 1980, 16 (05) :1111-1113

[5] RF-SPUTTERED CO-CR LAYERS FOR PERPENDICULAR MAGNETIC RECORDING .1. STRUCTURAL-PROPERTIES [J].

LODDER, JC ;

WIELINGA, T ;

WORST, J .

THIN SOLID FILMS, 1983, 101 (01) :61-73

[6]

WAITS RK, 1978, PLANAR MAGNETRON SPU, P131

[7] RF-SPUTTERED CO-CR LAYERS FOR PERPENDICULAR MAGNETIC RECORDING .2. MAGNETIC-ANISOTROPY [J].

WORST, J ;

LODDER, JC ;

WIELINGA, T .

THIN SOLID FILMS, 1983, 101 (01) :75-81

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