PLASMA STUDIES ON THE LEYBOLD-HERAEUS INA3 SECONDARY NEUTRAL MASS-SPECTROMETRY SYSTEM

被引：21

作者：

WUCHER, A ^{[1
]}

机构：

[1] IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1988年 / 6卷 / 04期

关键词：

D O I：

10.1116/1.575026

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：2293 / 2298

页数：6

共 23 条

[1] [Anonymous], 1965, ELECT PROBES
[2] THE COLLECTION OF POSITIVE IONS BY A PROBE IN AN ELECTRICAL DISCHARGE
BOYD, RLF
[J]. PROCEEDINGS OF THE ROYAL SOCIETY OF LONDON SERIES A-MATHEMATICAL AND PHYSICAL SCIENCES, 1950, 201 (1066): : 329 - 349
[3] DUSHMAN S, 1958, SCI F VACUUM TECHNIQ
[4] MASS-SPECTROMETRY OF NEUTRAL MOLECULES SPUTTERED FROM POLYCRYSTALLINE METALS BY AR+-IONS OF 100-1000 EV
GERHARD, W
OECHSNER, H
[J]. ZEITSCHRIFT FUR PHYSIK B-CONDENSED MATTER, 1975, 22 (01): : 41 - 48
[5] HALDEN T, 1984, THESIS U KAISERSLAUT
[6] QUANTITATIVE DEPTH PROFILE AND BULK ANALYSIS WITH HIGH DYNAMIC-RANGE BY ELECTRON-GAS SPUTTERED NEUTRAL MASS-SPECTROMETRY
JEDE, R
PETERS, H
DUNNEBIER, G
GANSCHOW, O
KAISER, U
SEIFERT, K
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1988, 6 (04): : 2271 - 2279
[7] JOHNSON CC, 1965, FIELD WAVE ELECTRODY
[8] ADSORPTION OF CO ON (110) PLANE OF TUNGSTEN
KOHRT, C
[J]. SURFACE SCIENCE, 1971, 24 (01) : 77 - &
[9] AN EMPIRICAL FORMULA FOR ELECTRON-IMPACT IONIZATION CROSS-SECTION
LOTZ, W
[J]. ZEITSCHRIFT FUR PHYSIK, 1967, 206 (02): : 205 - &
[10] MULLER KH, 1985, J VAC SCI TECHNOL A, V3, P1367, DOI 10.1116/1.572780