PRODUCTION OF METASTABLE AND RESONANT ATOMS IN RARE-GAS (HE, NE, AR) RADIO-FREQUENCY AND MICROWAVE-SUSTAINED DISCHARGES

被引：29

作者：

RICARD, A ^{[1
]}

BARBEAU, C ^{[1
]}

BESNER, A ^{[1
]}

HUBERT, J ^{[1
]}

MARGOTCHAKER, J ^{[1
]}

MOISAN, M ^{[1
]}

SAUVE, G ^{[1
]}

机构：

[1] UNIV MONTREAL,DEPT PHYS,MONTREAL H3C 3J7,QUEBEC,CANADA

来源：

CANADIAN JOURNAL OF PHYSICS | 1988年 / 66卷 / 08期

关键词：

D O I：

10.1139/p88-122

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

引用

页码：740 / 748

页数：9

共 19 条

[1] MICROWAVE AND RF SURFACE-WAVE SUSTAINED DISCHARGES AS PLASMA SOURCES FOR PLASMA CHEMISTRY AND PLASMA PROCESSING [J].

CHAKER, M ;

MOISAN, M ;

ZAKRZEWSKI, Z .

PLASMA CHEMISTRY AND PLASMA PROCESSING, 1986, 6 (01) :79-96

[2] THEORY OF A PLASMA-COLUMN SUSTAINED BY A SURFACE-WAVE [J].

FERREIRA, CM .

JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1981, 14 (10) :1811-1830

[3] ELECTRON-ENERGY DISTRIBUTIONS AND EXCITATION RATES IN HIGH-FREQUENCY ARGON DISCHARGES [J].

FERREIRA, CM ;

LOUREIRO, J .

JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1983, 16 (12) :2471-2483

[4] POPULATIONS IN THE METASTABLE AND THE RESONANCE LEVELS OF ARGON AND STEPWISE IONIZATION EFFECTS IN A LOW-PRESSURE ARGON POSITIVE-COLUMN [J].

FERREIRA, CM ;

LOUREIRO, J ;

RICARD, A .

JOURNAL OF APPLIED PHYSICS, 1985, 57 (01) :82-90

[5] MODELING OF THE LOW-PRESSURE ARGON POSITIVE-COLUMN [J].

FERREIRA, CM ;

RICARD, A .

JOURNAL OF APPLIED PHYSICS, 1983, 54 (05) :2261-2271

[6]

FERREIRA CM, 1986, SURFACE WAVES PLASMA, P440

[7]

MARGOTCHAKER J, 1987, 18 INT C PHEN ION GA, V4, P852

[8]

MARGOTCHAKER J, 1987, 18 INT C PHEN ION GA, V4, P854

[9] PROPAGATION OF A LARGE-AMPLITUDE SURFACE-WAVE IN A PLASMA-COLUMN SUSTAINED BY THE WAVE [J].

MATEEV, E ;

ZHELYAZKOV, I ;

ATANASSOV, V .

JOURNAL OF APPLIED PHYSICS, 1983, 54 (06) :3049-3052

[10] PROPERTIES AND APPLICATIONS OF SURFACE-WAVE PRODUCED PLASMAS [J].

MOISAN, M ;

FERREIRA, CM ;

HAJLAOUI, Y ;

HENRY, D ;

HUBERT, J ;

PANTEL, R ;

RICARD, A ;

ZAKRZEWSKI, Z .

REVUE DE PHYSIQUE APPLIQUEE, 1982, 17 (11) :707-727

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