PHOTOLYSIS LASER-INDUCED FLUORESCENCE DIAGNOSTIC FOR GACL

被引:4
作者
ALFANO, AJ [1 ]
BENARD, DJ [1 ]
机构
[1] ROCKWELL INT CORP, CTR SCI, THOUSAND OAKS, CA 91360 USA
来源
APPLIED OPTICS | 1993年 / 32卷 / 27期
关键词
GACL; DIAGNOSTIC; LASER-INDUCED FLUORESCENCE; PHOTOLYSIS;
D O I
10.1364/AO.32.005373
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
A spatially resolved optical diagnostic for GaCl is described. The technique uses 248-nm excimer laser radiation to photolyze GaCl and also to excite fluorescence in the resulting gallium atoms. This yields gallium fluorescence at 245, 266, 287, 294, 403, and 417 nm. The method is specific to GaCl and is not affected by the presence of a GaCl3 precursor. Gallium fluorescence is linear in both the GaCl partial pressure and the laser energy under specified conditions. The photophysics of this process are contrasted to related GACl studies of dissociative excitation at 193 nm.
引用
收藏
页码:5373 / 5378
页数:6
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