VIBRATION-INSENSITIVE INTERFEROMETER FOR ONLINE MEASUREMENTS

被引：25

作者：

MELOZZI, M

PEZZATI, L

MAZZONI, A

机构：

[1] Officine Galileo, Campi Bisenzio, Florence, 50013

[2] Istituto Nazionale di Ottica, Arcetri, Florence, 50125

来源：

APPLIED OPTICS | 1995年 / 34卷 / 25期

关键词：

INTERFEROMETRY; VIBRATIONS; PHASE SHIFTING;

D O I：

10.1364/AO.34.005595

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We have realized a digital Twyman-Green interferometer to measure the quality of optical surfaces in unstable environments. The system yields accurate measurements even in the presence of severe mechanical vibrations. The interferograms are decoded by application of a spatial-carrier phase-shifting fringe-analysis technique. The interferometer was mounted over a production machine and used for on-line measurements of aspheric mirror surfaces during the figuring and polishing process.

引用

页码：5595 / 5601

页数：7

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