SPUTTERING AND ION-SOURCE TECHNOLOGY

[51] EMISSION OF NEGATIVE IONS FROM METAL SURFACES BOMBARDED BY POSITIVE CESIUM IONS [J]. JOURNAL OF APPLIED PHYSICS, 1962, 33 (12) : 3523 - &

[52] Lindhard J., 1963, KGL DANSKE VIDENSKAB, V33

[53] EJECTION OF ATOMIC PARTICLES FROM ION BOMBARDED SOLIDS [J]. ADVANCES IN PHYSICS, 1970, 19 (80) : 457 - &

[54] SPUTTERING FROM ENERGETIC SELF-ION CASCADES [J]. JOURNAL OF NUCLEAR MATERIALS, 1974, 53 (01) : 231 - 237

[55] MERTENS P, 1975, THESIS BERLIN

[56] CLOSE TO UNIVERSAL NEGATIVE-ION SOURCE [J]. NUCLEAR INSTRUMENTS & METHODS, 1974, 118 (02): : 329 - 336

[57] SURVEY OF NEGATIVE-ION SOURCES FOR TANDEM ACCELERATORS [J]. NUCLEAR INSTRUMENTS & METHODS, 1974, 122 (1-2): : 35 - 43

[58] COMPARISON OF RADIATION-DAMAGE PRODUCED IN GALLIUM-ARSENIDE BY MONATOMIC AND DIATOMIC ARSENIC IMPLANTS [J]. RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1975, 25 (01): : 49 - 51

[59] MULLER M, 1669, IEEE T NUCL SCI, V16, P38

[60] Nelson R. S., 1968, OBSERVATION ATOMIC C

[51] EMISSION OF NEGATIVE IONS FROM METAL SURFACES BOMBARDED BY POSITIVE CESIUM IONS [J]. JOURNAL OF APPLIED PHYSICS, 1962, 33 (12) : 3523 - &

[52] Lindhard J., 1963, KGL DANSKE VIDENSKAB, V33

[53] EJECTION OF ATOMIC PARTICLES FROM ION BOMBARDED SOLIDS [J]. ADVANCES IN PHYSICS, 1970, 19 (80) : 457 - &

[54] SPUTTERING FROM ENERGETIC SELF-ION CASCADES [J]. JOURNAL OF NUCLEAR MATERIALS, 1974, 53 (01) : 231 - 237

[55] MERTENS P, 1975, THESIS BERLIN

[56] CLOSE TO UNIVERSAL NEGATIVE-ION SOURCE [J]. NUCLEAR INSTRUMENTS & METHODS, 1974, 118 (02): : 329 - 336

[57] SURVEY OF NEGATIVE-ION SOURCES FOR TANDEM ACCELERATORS [J]. NUCLEAR INSTRUMENTS & METHODS, 1974, 122 (1-2): : 35 - 43

[58] COMPARISON OF RADIATION-DAMAGE PRODUCED IN GALLIUM-ARSENIDE BY MONATOMIC AND DIATOMIC ARSENIC IMPLANTS [J]. RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1975, 25 (01): : 49 - 51

[59] MULLER M, 1669, IEEE T NUCL SCI, V16, P38

[60] Nelson R. S., 1968, OBSERVATION ATOMIC C