OPTICALLY ACTIVATED VIBRATIONS IN A MICROMACHINED SILICA STRUCTURE

被引：56

作者：

VENKATESH, S

CULSHAW, B

机构：

[1] Univ of Strathclyde, Dep of, Electronic & Electrical, Engineering, Glasgow, Scotl, Univ of Strathclyde, Dep of Electronic & Electrical Engineering, Glasgow, Scotl

来源：

ELECTRONICS LETTERS | 1985年 / 21卷 / 08期

关键词：

OPTICAL DEVICES - SENSORS - SILICA;

D O I：

10.1049/el:19850223

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A microminiature bridge of silicon dioxide, fabricated using anisotropic etch techniques on a silicon substrate, has been set into mechanical vibration by direct interaction with a low-power laser beam. The displacement sensitivity and frequency response of the optomechanical interaction have been characterized using optical interferometry. The implications of the results for the development of radically new optical sensors are discussed.

引用

页码：315 / 317

页数：3