DIRECT OBSERVATION OF CHEMICAL VAPOR-DEPOSITED DIAMOND FILMS BY ATOMIC FORCE MICROSCOPY

被引：29

作者：

BARANAUSKAS, V ^{[1
]}

FUKUI, M ^{[1
]}

RODRIGUES, CR ^{[1
]}

PARIZOTTO, N ^{[1
]}

TRAVAAIROLDI, VJ ^{[1
]}

机构：

[1] INST SPACE RES,DEPT MECH,SAO JOSE CAMPOS,SP,BRAZIL

来源：

APPLIED PHYSICS LETTERS | 1992年 / 60卷 / 13期

关键词：

D O I：

10.1063/1.107253

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Diamond polycrystals deposited by the hot-filament chemical vapor deposition method on silicon (100) substrates have been examined by atomic force microscopy (AFM) in air. Measurements of the diamond unit cell show periodic spacings between 0.34 to 0.37 mm in a very good agreement with the theoretical value of the bulk constant of natural diamond (0.356 nm). Hybridized sp3 bonds can also be observed at the (111) surface.

引用

页码：1567 / 1589

页数：23

共 14 条

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