KINETICS OF N-2+ AND N+ REACTIONS WITH MO AT LESS-THAN 100 EV IMPACT ENERGIES

被引：28

作者：

BALDWIN, DA ^{[1
]}

SHAMIR, N ^{[1
]}

RABALAIS, JW ^{[1
]}

机构：

[1] UNIV HOUSTON,DEPT CHEM,HOUSTON,TX 77004

来源：

SURFACE SCIENCE | 1984年 / 141卷 / 2-3期

关键词：

D O I：

10.1016/0039-6028(84)90153-5

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：617 / 638

页数：22

共 77 条

[1]

Afanas'ev G. V., 1977, Soviet Physics - Crystallography, V22, P480

[2] ION-BEAM DEPOSITION OF THIN FILMS OF DIAMONDLIKE CARBON [J].

AISENBERG, S ;

CHABOT, R .

JOURNAL OF APPLIED PHYSICS, 1971, 42 (07) :2953-+

[3] DESIGN-FEATURES AND FOCAL PROPERTIES OF SIMPLE 3 ELEMENT 2-DIMENSIONAL OR 3-DIMENSIONAL LENS SYSTEMS FOR DECELERATING INTENSE ION-BEAMS TO VERY LOW ENERGIES [J].

ALTON, GD ;

ROBERTO, JB ;

WHITE, CW ;

ZUHR, RA .

NUCLEAR INSTRUMENTS & METHODS, 1980, 177 (2-3) :273-280

[4]

AMANO J, 1977, J VAC SCI TECHNOL, V14, P695, DOI 10.1116/1.569185

[5] THIN-FILM DEPOSITION USING LOW-ENERGY ION-BEAMS .2. PB+ ION-BEAM DEPOSITION AND ANALYSIS OF DEPOSITS [J].

AMANO, J ;

LAWSON, RPW .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1977, 14 (02) :690-694

[6]

ANDERSEN HH, 1982, ADV ION IMPLANTATION

[7] LOW-ENERGY (LESS-THAN-OR-EQUAL-TO-100 EV) SPUTTERING OF THIN MOLYBDENUM NITRIDE FILMS [J].

BALDWIN, DA ;

SHAMIR, N ;

HOCHMANN, P ;

RABALAIS, JW .

SURFACE SCIENCE, 1983, 130 (02) :361-372

[8] MOLYBDENUM NITRIDE FILM GROWTH BY REACTION WITH N-2+ AND N+ BEAMS - ENERGY AND DOSE DEPENDENCE [J].

BALDWIN, DA ;

SHAMIR, N ;

RABALAIS, JW .

APPLICATIONS OF SURFACE SCIENCE, 1982, 11-2 (JUL) :229-234

[9]

BALDWIN DA, UNPUB REV SCI INSTR

[10]

BALDWIN DA, 1982, THESIS U HOUSTON

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