SIMPLE MODELING TECHNIQUES FOR ANALYSIS OF LASER-BEAM INDUCED CURRENT IMAGES

被引：8

作者：

HENNESSY, J ^{[1
]}

MCDONALD, P ^{[1
]}

机构：

[1] HONEYWELL INC,DIV ELECTROOPT,LEXINGTON,MA 02173

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1990年 / 8卷 / 02期

关键词：

D O I：

10.1116/1.576973

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Spatially resolved laser beam induced current measurements yield large volumes of data. We present here a data reduction technique based on simple emulation of the laser beam induced current (LBIC) response expected from a distribution of charge in a medium. A model for the current expected when scanning over a buried charged sheet allows some LBIC data to be reduced to a geometric model for a cracked sample. The results obtained are sufficiently encouraging to indicate that such modeling methods can reduce the often complex LBIC images obtained from HgCdTe material to a digest of geometric and electrical properties. © 1990, American Vacuum Society. All rights reserved.

引用

页码：1127 / 1132

页数：6

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