FRICTION COEFFICIENT OF SI-C, TI-C AND GE-C COATINGS WITH EXCESS CARBON FORMED BY PLASMA-ASSISTED CHEMICAL VAPOR-DEPOSITION

被引：40

作者：

OGURI, K

ARAI, T

机构：

[1] Toyota Central Research and Development Laboratories, Inc., Aichi-gun, Aichi-ken, 480-11, 41-1, Aza Yokomichi, Oaza Nagakute, Nagakute-cho

来源：

THIN SOLID FILMS | 1992年 / 208卷 / 02期

关键词：

D O I：

10.1016/0040-6090(92)90635-O

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

[No abstract available]

引用

页码：158 / 160

页数：3

共 11 条

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[9] EFFECT OF EXCESS CARBON ON THE HARDNESS OF SI-C AND TI-C COATINGS FORMED BY PLASMA-ASSISTED CHEMICAL VAPOR-DEPOSITION [J].

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[10] LOW FRICTION COATINGS OF DIAMOND-LIKE CARBON WITH SILICON PREPARED BY PLASMA-ASSISTED CHEMICAL VAPOR-DEPOSITION [J].

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