LARGE-SCALE MICROWAVE PLASMA POLYMERIZATION - A STUDY ON HYDROGENATED CARBON-FILMS

被引：3

作者：

KIESER, J

SELLSCHOPP, M

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1986年 / 4卷 / 02期

关键词：

D O I：

10.1116/1.573475

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：222 / 225

页数：4

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[4] ELECTRON-MICROSCOPY STUDIES OF PLASMA-POLYMERIZED ORGANO-SILICON THIN-FILMS [J].

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KRYSZEWSKI, M .

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[5] INDUSTRIAL MICROWAVE PLASMA POLYMERIZATION [J].

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[6]

Kieser J., 1983, Proceedings of the International Ion Engineering Congress. The 7th Symposium (1983 International) on Ion Sources and Ion Assisted Technology (ISIAT '83) and the 4th International Conference on Ion and Plasma Assisted Techniques (IPAT '83), P1447

[7] FORMATION OF AN AMORPHOUS POWDER DURING POLYMERIZATION OF ETHYLENE IN A RADIO-FREQUENCY DISCHARGE [J].