ELECTRON-MICROSCOPY STUDIES OF PLASMA-POLYMERIZED ORGANO-SILICON THIN-FILMS

被引：9

作者：

GREBOWICZ, J

PAKULA, T

WROBEL, AM

KRYSZEWSKI, M

机构：

来源：

THIN SOLID FILMS | 1980年 / 65卷 / 03期

关键词：

D O I：

10.1016/0040-6090(80)90245-X

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：351 / 359

页数：9

共 13 条

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[3]

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[5] SCANNING ELECTRON-MICROSCOPE STUDY OF PLASMA-POLYMERIZED ORGANOSILICON FILMS SUITABLE FOR USE AS LIGHTGUIDES - DETERMINATION OF CAUSE OF SIGNAL ATTENUATION [J].

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[6] PLASMA POLYMERIZATION OF VINYL MONOMERS .2. DETAILED STUDY OF PLASMA POLYMERIZATION OF STYRENE [J].

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[7]

THOMPSON LF, 1971, J APPL POLYM SCI, V15, P51

[8] MECHANISM OF ORGANIC LAYER FORMATION IN LOW-PRESSURE PLASMAS - LAYER FORMATION IN POSITIVE-COLUMN WITH STYRENE [J].

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[9]

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[10] MECHANISM OF POLYSILAZANE THIN-FILM FORMATION DURING GLOW-DISCHARGE POLYMERIZATION OF HEXAMETHYLCYCLOTRISILAZANE [J].

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POLYMER, 1976, 17 (08) :673-677

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